In a number of cases where highly-sensitive components and materials are processed (e.g. in the semiconductor and medical engineering industries, even contamination in the form of gases are capable of seriously impairing product quality. Consequently, at the Fraunhofer IPA the outgassing spectra of the materials used are also investigated as part of cleanroom and cleanliness suitability tests on manufacturing equipment.
Filmy contamination is caused by highly volatile, organic or molecular contamination. The manufacture of hard disks or memory chips is one area of industry where it is of utmost importance that manufacturing equipment is as free as possible from filmy contamination. It is essential that manufacturing equipment is not only tested for the emission of particulate contamination in the micrometer range but also for its contaminating behavior as far as chemical outgassing products are concerned. Sound analysis of the outgassing behavior of manufacturing utilities and their components give an indication of their suitability for use in manufacturing processes.
At the Fraunhofer IPA, the emission of highly-volatile, organic or molecular contamination from manufacturing equipment is ascertained using state-of-the art instrumental analytics. The results are then correlated with limiting values specific to the corresponding processes to enable a statement concerning their suitability for use in processes to be made.
The quality features of manufacturing equipment for cleanroom applications are assessed using trace analysis methods in accredited test laboratories and then awarded the Fraunhofer IPA test seal for cleanroom and cleanliness suitability.
